HomeNews & EventsASML and TU/e strengthen longstanding collaboration

ASML and TU/e strengthen longstanding collaboration

24 April 2023 | Semiconductor global player ASML and Eindhoven University of Technology today announced a new phase in their longstanding partnership. This includes a jointly defined research programme and the construction of a new ASML research facility on the TU/e campus, including the creation of a state-of-the-art cleanroom.

The two parties signed a memorandum of understanding to jointly develop a 10-year strategic research road map in the fields of plasma physics, artificial intelligence, mechatronics and semiconductor lithography. The TU/e and ASML will invest substantially and equally in the joint programme. The newly created programme will together create up to 40 PhD positions yearly, for which the TU/e will recruit internationally renowned top scientific talents. In turn, ASML will supply its top engineers as hybrid teachers in these areas and will increase the number of internships it hosts. This approach will scale up the already proven and longstanding close collaboration between the TU/e and ASML, bringing together the best in science and engineering in Brainport Eindhoven.

Additionally, ASML announced that TU/e is in the process of granting a long-term lease on the TU/e campus to realize a new ASML research facility in the coming years, where the company intends to co-locate the many competences of its Research team. The new facility will also have shared workspaces, meeting rooms, research labs and a state-of-the-art cleanroom facility. The new cleanroom facility will also include analytical and production equipment in an open-access research laboratory that is also available to TU/e, to other research centers and industrial partners. This collaborative cleanroom space will enable growth and synergy across academic research fields of mutual interest such as photonics, quantum computing, nano materials and chip manufacturing. In addition, the facility will include substantial cleanroom space dedicated to TU/e exclusively. This space will be rented long-term to TU/e, for fundamental research in the same and related areas.

The realisation of the envisioned facility involves an estimated investment of several hundred million euros. It is intended to provide space for more than five hundred researchers, including several hundred ASML employees.

© Eindhoven University of Technology.
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ASML and TU/e sign the 'memorandum of understanding'. From left to right: Frank Schuurmans (Head of Research ASML), Robert-Jan Smits (President TU/e) and Jos Benschop (Senior Vice President Technology ASML).
ASML and TU/e sign the 'memorandum of understanding'. From left to right: Frank Schuurmans (Head of Research ASML), Robert-Jan Smits (President TU/e) and Jos Benschop (Senior Vice President Technology ASML). Photo: Bart van Overbeeke